Equipment Engineer - Etch

Key Responsibilities

1. Equipment Ownership & Uptime

Serve as primary owner for assigned tools, such as Trymax and Axcelis tools

Maintain and continuously improve OEE , MTBF , and MTTR targets.

Develop and maintain equipment health monitoring and baseline control (SPC, FDC, fault codes, alarms).

Drive daily tool performance reviews , documenting issues, actions, and recovery plans.

2. Maintenance & Troubleshooting

Plan, execute, and optimize preventive maintenance (PM) activities according to OEM recommendations and fab strategies.

Perform complex troubleshooting on electrical, mechanical, vacuum, RF, gas delivery, and software subsystems.

Lead root cause analysis (RCA) for chronic and high‑impact issues using structured methods (8D, Fishbone, 5‑Why, etc.).

Coordinate and supervise vendor field service engineers (FSEs) and contractors during major interventions, upgrades, and rebuilds.

3. Process / Equipment Interaction

Work closely with process engineering to ensure equipment performance supports CD, profile, uniformity, selectivity, and defectivity requirements.

Analyze tool logs, SPC charts, metrology data, and wafer maps to correlate equipment conditions with yield and parametric performance.

Support process qualifications , chamber swaps , hardware changes , and recipe releases .

Ensure correct implementation and maintenance of chamber matching between AMAT and TEL tools.

4. Continuous Improvement & Cost Reduction

Identify and implement improvement projects to increase uptime, extend parts lifetime, and reduce operating cost.

Optimize consumables usage and spare parts strategy (buffer stock, repair vs. replace, refurbishment plans).

Participate in or lead CIP / Lean / Six Sigma projects for productivity and quality enhancement.

Support capacity upgrades (chamber additions, throughput improvement, software enhancements).

5. Documentation, Procedure & Training

Create and maintain standard operating procedures (SOPs) , maintenance procedures , and troubleshooting guides for AMAT SuperE, AMAT DPS.

Document all events, alarms, interventions, and changes in the equipment history system (EHS/CMMS).

Provide technical training and coaching to equipment technicians, junior engineers, and shift personnel.

Ensure compliance with change management process for hardware, software, and recipe modifications.

6. Safety & Compliance

Ensure all activities follow EHS regulations , company safety rules, and cleanroom protocols.

Conduct and support risk assessments , LOTO procedures, and safety audits for gas, chemical, RF, and high‑voltage systems.

Support compliance with ISO/Automotive/Quality Management Systems as applicable.

Job Requirements

Bachelor's Degree in Electrical & Electronics Engineering, Materials Science Engineering, Chemical Engineering or equivalent

Minimum 2 years of relevant work experience in Semiconductor area, familiar with Trymax, Axcelis or Mattson tools

Good analytical and creative problem-solving skills with a keen eye to details

High degree of interpersonal skills and able to work both independently and with cross-functional teams

Knowledge of SPC, FMEA, 8D methodologies.